Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).
Microelectromechanical systems - Wikipedia, the free encyclopedia
Microelectromechanical systems (MEMS) is the technology of very small devices. | 微機電系統（英語：Microelectromechanical Systems，縮寫為MEMS）是將微電子技術與機械工程融合到一起的一種工業技術，它的操作範圍在微米範圍內。| Pinned Time: 20141026 18:04, Taipei Time.
Introduction to Microelectromechanical Systems (MEMS) | Compliant Mechanisms